参考文献
[1] P. O. Vaccaro, K. Kubota, and T. Aida,“Strain-driven self-positioning of micromachined
structures,”Appl. Phys. Lett. 78, 2852（2001）.
[2] K. Kubota, T. Fleischmann, S. Saravanan, P. O. Vaccaro, and T. Aida,“Self-assembly
of Microstage Using Micro-Origami Technique on GaAs,”Jpn. J. Appl. Phys. 42, 4079（2003）.
[3] T. Fleischmann, K. Kubota, P. O. Vaccaro, T.-S . Wang, S. Saravanan, and N.
Saito,“Self-assembling GaAs mirror with electrostatic actuation using micro-origami,”Physica
E 24, 78（2004）.
[4] J. M. Zanardi Ocampo, P. O. Vaccaro, T. Fleischmann, T.-S . Wang, K. Kubota,
T. Aida, T. Ohnishi, A. Sugimura, R. Izumoto, M. Hosoda, and S. Nashima,“Optical
actuation of micromirrors fabricated by the micro-origami technique,”Appl. Phys.
Lett. 83, 3647（2003）.
[5] N. Dharmarasu, K. Kubota, S. Saravanan, P. O. Vaccaro, and N. Saito,“Monolithic
integration of GaAs-based micro-origami mirrors with light emitting diodes,”presented
at IEEE/LEOS Optical MEMS（Takamatsu, 2004）.
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